1. Kev Tso Tawm
Thawj kauj ruam hauv kev tsim khoom nti feem ntau yog kom tso ib zaj duab xis nyias nyias ntawm cov khoom ntawm lub wafer. Cov khoom siv tuaj yeem yog tus neeg xyuas pib, tus rwb thaiv tsev, lossis lub ntsuas hluav taws xob.
2, photoresist txheej
Ua ntej sau duab, cov khoom siv duab" photoresist" lossis" photoresist" yog thawj coated rau ntawm wafer, thiab tom qab ntawd cov wafer muab tso rau hauv lub tshuab lithography.
3. Raug Rho Tawm
Ua tus qauv thawm duab uas yuav tsum tau luam tawm ntawm cov paum ntev. Tom qab tus wafer muab tso rau hauv lub tshuab lithography, lub teeb ci yog npaj mus rau wafer los ntawm reticle. Cov ntsiab lus kho qhov muag hauv lub tshuab lithography ntsws thiab tsom cov qauv mus rau photoresist txheej. Hauv qab qhov kev tsis sib haum ntawm lub teeb ntom nti, tus kws yees duab tawm mus yauv hauv tshuaj lom neeg, thiab cov qauv ntawm photomask yog li tau tsim ntawm daim duab photoresist txheej.
4. Kev sib piv ntawm lub lev khoom
Lub cev thiab tshuaj lom neeg tsim tawm thaum lub sijhawm photolithography tuaj yeem ua rau tus qauv deformation, yog li nws yuav tsum tau kho cov qauv ntawm qhov rov qab ua ntej kom ntseeg tau qhov tseeb ntawm cov qauv kawg ntawm photolithography. ASML koom ua ke cov ntaub ntawv lithography uas twb muaj lawm thiab cov ntaub ntawv xeem wafer los tsim cov qauv algorithm thiab ua kom haum cov qauv.
5. Ci thiab tsim
Tom qab tus wafer tawm lub tshuab ua lithography, nws yuav tsum tau ci thiab tsim kom tau cov qauv lithography. Ntxuav cov dej ntau dhau ntawm qhov photoresist, tawm hauv qhov seem ntawm txheej.
6, etching
Tom qab qhov kev txhim kho tiav, siv cov roj av thiab lwm yam khoom siv los tshem tawm qhov seem tsis txaus los ua ib qho qauv 3D Circuit Court.
7, ntsuas thiab ntsuas
Thaum lub sijhawm cov khoom tsim chip, cov chaw tos khoom siv yuav tsum ntsuas thiab tshawb xyuas txhua yam kom paub tseeb tias tsis muaj qhov ua yuam kev. Cov txiaj ntsig kev kuaj xyuas tau pub rov qab rau hauv lub tshuab lithography kom ua kom zoo dua ntxiv thiab kho cov cuab yeej.
8. Ion kev cog hniav
Ua ntej tshem cov duab rov qab, lub wafer tuaj yeem tso nrog qhov tsis zoo los sis qhov tsis zoo los kho lub ntsej muag semiconductor cov yam ntxwv ntawm ib feem ntawm cov qauv.
9. Rov ua cov theem ntawm cov txheej txheem raws li xav tau
Los ntawm zaj duab xis cia mus rau tshem tawm ntawm photoresist, tag nrho cov txheej txheem npog lub wafer nrog ib tus qauv. Txhawm rau tsim cov ntawv sib txuas ntawm lub zam rau kom tiav cov nti ntau lawm, txoj kev no yuav tsum tau rov ua tas li, mus txog 100 zaug.
10, ntim nti
Cov kauj ruam kawg yog txiav cov wafer kom tau ib qho nti, uas yog ntim rau hauv rooj plaub tiv thaiv. Txoj kev no, cov nti ua tiav tuaj yeem siv los tsim TVs, ntsiav tshuaj lossis lwm yam khoom siv digital!
Yog tias koj xav tau ntawm peb cov khoom lag luam, thov tuaj xyuaswww.hkram.comtohavemoreinformation.